Removal Efficiency for Organic Compounds in Cleanroom Air by Air Washer at LCD Manufacturing Factory

摘要

Many organic compounds are present in cleanroom air of liquid crystal display (LCD) manufacturing factories, it is therefore important to remove organic compounds from the clean room air. The purpose of this study is to investigate the removal performances of air washer for monoethanolamine (MEA), acetic acid and dimethyl sulfoxide (DMSO), which are commonly found in the LCD cleanoroom air. I the removal test for a single component, the removal efficiency of MEA by air washer was 57% and that of acetic acid was 38% at the washer water/air ratio (L/G) of 0.8. In the test with the mixed gas, the removal efficiency of MEA, acetic acid, and DMSO by the air washer and cooling coils was 95%, 97%, and 92% respectively. In the case of an actual LCD cleanroom equipped with the air washer in circulation air conditioning units, the concentration of MEA, acetic acid, and DMSO is estimated to decrease to 9%, 28%, and 10% of that without the air washer.