Thickness Measurement of Transparent Target Using A Confocal Sensor

摘要

The work shows a confocal displacement sensor with a varifocal lens, which is driven through different current to change its focal length. The study shows the measuring results of the thickness of transparent object. With power meter measuring the power and LabVIEW program recording the power-current graph, which with two peak powers are presented and the current gap between two peaks could be transferred to two displacements to what the spacing is between is the thickness.