The parametric block diagram and transfer functions of the composite nanoshift piesoengine

摘要

The parametric block diagram of the compound piezoengine, for longitudinal and cross piezoelectric effect when controlling a piezodrive of nanomoving by voltage, is plotted. Influence of geometric and physical parameters of the compound piezoengine and an environmental stress on its static and dynamic attributes is defined, and transfer functions for compound piezoengine of nanomoving are found.