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Preparation of lead chromate chromate crystalline thin films by RF-magnetron sputtering method

机译:RF-磁控溅射法制备铅铬酸盐铬酸盐结晶薄膜

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摘要

Crystalline thin films of lead chromates, Pb_(1+x)CrO_(4+x)(0<=x<=1) could be prepared by RF-magnetron sputtering using a PbCrO_4 target under the atmosphere of 3Pa Argon and 1 Pa oxygen. The chromates formed wre composed of PbCrO_4 and Pb_2CrO_5, and the relative compositions of the two phases changed rather sensitively with a change in RF power and substrate temperature. A single phase of PbCrO_4 (x=0) was formed when both the power and th etemperature were low, (eg; 100 W and 300 deg C), while that of Pb_2CrO_5 (x=1) was under the opposite conditions (eg; 200 W and 550 deg C), with the mixture being obtained under the intermediate conditions.
机译:结晶薄膜的铅铬酸盐,PB_(1 + x)CRO_(4 + X)(0 <= x <= 1)可以通过在3Pa氩气的大气下使用PBCRO_4靶标的RF-磁控溅射来制备,并在3Pa氩气氛下氧气和1Pa氧气 。 由PBCro_4和Pb_2Cro_5组成的WRE形成的铬酸盐,并且两相的相对组合物随着RF功率和衬底温度的变化而变化。 当两个功率和Th eTemperature低时形成单相的PBCro_4(x = 0),(例如; 100W和300℃),而PB_2CRO_5(x = 1)的电力在相反的条件下(例如; 200 W和550℃),混合物在中间条件下获得。

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