軟磁性材料薄膜IV 「Fe-Ni系軟磁性薄膜」

摘要

Permalloy is the term for a Ni-Fe alloy, generally referring to an alloy with about 80 at%Ni content. Because of its specific features of zero-magnetostriction and zero-crystalline anisotropy, films of Permalloy alloy have been widely used in various magnetic applications.This article presents a review of magnetic softness, significant anisotropic magnetoresistance (AMR) and a few typical fabrication processes of Permalloy films, and also the origin of the inducedanisotropy that is critical for their high permeability performances. In addition, recent research subjects such as surface effects of ultrathin Permalloy films, the damping factor at ultra-high frequencies, and the anomalous anisotropy field (H_k) associated with nanosecond magnetization processes will be described.