Vacuum-plasma sprayed nanostructured titanium oxide films

摘要

Nanostructured titanium oxide films were fabricated by vacuum-plasma spraying. The microstructure of the films was characterized with SEM, TEM, and XRD. The chemical state of the titanium oxide of the films was analyzed using XPS. The resultsindicated that the vacuum-plasma sprayed nanostructured titanium oxide films possessed a corallike structure with small pores and agglomerated grains, which was composed of nanosized particles. The main phases of the films were anatase and rutile, andtheir relative content was determined by the plasma parameters. Low-valence titanium cations were also found in the films.