Optimizing silver‐capped silicon nanopillars to simultaneously realize macroscopic, practical‐level SERSSERS signal reproducibility and high enhancement at low costs

机译：优化银粘贴硅纳米粒子，同时实现宏观，实际级别 sers sers信号再现性和高增强

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Abstract > The ideal surface‐enhanced Raman spectroscopy (SERS) substrate should fulfil the following: (a) predictable SERS enhancement, (b) macroscale SERS signal uniformity, and (c) suitability for mass production at low costs. Macroscale SERS uniformity and reproducibility at practical levels are big obstacles, which have been preventing most SERS substrates from reliable sensing applications. We have previously shown that SERS‐active nanopillar structures, fabricated by lithography‐free processes, exhibit high average SERS enhancements and are mass producible. Here, we report an optimized process and show that the improved structures exhibit unrivalled macroscale SERS uniformities (RSD: ～2.5% in millimeter scale, ～7% in wafer scale) and reproducibility (RSD: ～1.5% across 3 wafers), while at the same time exhibiting a very large average SERS enhancement factor of 10 8 . The obtained SERS uniformity (~2.5% RSD in millimeter scale) is the best to date measured on large‐area solid SERS substrates. Fast and reproducible SERS analysis of trans‐1,2‐bis (4‐pyridyl) ethylene down to 4?×?10 ?13 ?mol is demonstrated using the optimized structures. We emphasize that achieving simultaneously macroscopic, practical‐level SERS signal reproducibility and high enhancement via a lithography‐free process is a notable advance towards industrialization of substrate‐based SERS sensors. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><abstract xmlns =“http://www.wiley.com/namespaces/wiley”type =“main”xml：lang =“en”> <title type =“main”>抽象</ title> >理想表面增强拉曼光谱（SERS）基板应满足以下内容：（a）可预测的SERS增强，（b）宏观SERS信号均匀性，（c）以低成本的批量生产适用于批量生产。 Macroscale Sers统一性和实际水平的再现性是大障碍，这一直在防止大多数SERS基材来自可靠的传感应用。我们之前已经表明，由无光刻工艺制造的SERS-活跃的纳米玻璃结构，表现出高平均SERS增强，并且是质量可生产的。在这里，我们报告了一个优化的过程，并表明改进的结构表现出无与伦比的宏观阶段均匀性（RSD：毫米刻度为〜2.5％，晶圆尺度〜7％）和再现性（3个晶圆上的RSD：〜1.5％），同时在同时表现出非常大的平均SERs增强因子，＆ 10 8 </ sup>。所获得的SERS均匀性（毫米尺度〜2.5％RSD）是在大面积固体SERS基材上测量的最佳迄今为止。使用优化的结构对Trans-1,2-双（4-吡啶基）乙烯分析Trans-1,2-双（4-吡啶基）乙烯分析为4〜×10 Δ13。我们强调，通过光刻的过程同时实现宏观，实际SERS信号再现性和高增强是朝向基于基板的SERS传感器的工业化的显着进展。 </ p> </ abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-35645/'>《Journal of Raman Spectroscopy: An International Journal for Original Work in All Aspects of Raman Spectroscopy, Including Higher Order Processes, and Also Brillouin- and Rayleigh Scattering》</a> <b style="margin: 0 2px;">|</b><span>2017年第12期</span><b style="margin: 0 2px;">|</b><span>共11页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wu Kaiyu&option=202" target="_blank" rel="nofollow">Wu Kaiyu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Rindzevicius Tomas&option=202" target="_blank" rel="nofollow">Rindzevicius Tomas;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Schmidt Michael S.&option=202" target="_blank" rel="nofollow">Schmidt Michael S.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Thilsted Anil H.&option=202" target="_blank" rel="nofollow">Thilsted Anil H.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Boisen Anja&option=202" target="_blank" rel="nofollow">Boisen Anja;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Department of Micro‐ and NanotechnologyTechnical University of Denmark?rsteds Plads Building 345B Kongens Lyngby 2800 Denmark;</p> <p>Department of Micro‐ and NanotechnologyTechnical University of Denmark?rsteds Plads Building 345B Kongens Lyngby 2800 Denmark;</p> <p>Department of Micro‐ and NanotechnologyTechnical University of Denmark?rsteds Plads Building 345B Kongens Lyngby 2800 Denmark;</p> <p>Department of Micro‐ and NanotechnologyTechnical University of Denmark?rsteds Plads Building 345B Kongens Lyngby 2800 Denmark;</p> <p>Department of Micro‐ and NanotechnologyTechnical University of Denmark?rsteds Plads Building 345B Kongens Lyngby 2800 Denmark;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/4724.html" title="光谱学">光谱学;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=mask‐less reactive ion etching&option=203" rel="nofollow">mask‐less reactive ion etching;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=nanopillars&option=203" rel="nofollow">nanopillars;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=SERS substrate&option=203" rel="nofollow">SERS substrate;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=SERS uniformity&option=203" rel="nofollow">SERS uniformity;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=surface‐enhanced R aman spectroscopy&option=203" rel="nofollow">surface‐enhanced R aman spectroscopy;</a> </p> <div class="translation"> 机译：掩模的反应离子蚀刻;纳米粒子;SERS基板;SERS均匀性;表面增强型R aman光谱; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704025815019.html">Optimizing silver‐capped silicon nanopillars to simultaneously realize macroscopic, practical‐level <fc xmlns="http://www.wiley.com/namespaces/wiley">SERS</fc>SERS signal reproducibility and high enhancement at low costs</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wu Kaiyu&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Wu Kaiyu,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Rindzevicius Tomas&option=202" 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