How to determine the wave aberrations of an optical system from the intensity distribution of the focused beam

摘要

This paper presents a method for determining the wave aberrations of an optical system from a relationship that connects the aberrations with the intensity distribution in the image of the beam outside its focusing region. Numerical simulation modeling of the method and experimental studies of the characteristics of a light beam focused by a multicomponent objective showed that the third- and higher-order wave aberrations inherent to the objective can be determined to within lambda/20. (C) 2019 Optical Society of America