A Polarizing Beam Splitting Coating Fabricated with the Use of the Wavelength-Indirect Broadband Optical Monitoring Method

摘要

We present a testing method based on the use of wavelength-indirect broadband optical monitoring. A polarizing beam splitting (PBS) coating applied at a wavelength of 1550 nm at an incidence angle of 45o was designed. The optimized coating structure contained 59 nonquarter-wave (QW) layers. Preproduction error analysis was used to estimate the advantages of the application of wavelength-indirect broadband optical monitoring. Then, we deposited the PBS coating with an optimized monitoring strategy by ion beam sputtering (IBS). Finally, reverse engineering of the produced PBS coatings was executed. The experimental results show that a good agreement between the theoretical target and the measured transmittance is obtained, the maximum error in the first and last two layers is about 10%, and the minimum error is only about 0.01%.