General Features of Interaction between Copper and Chlorine-Containing Gases

摘要

The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of -61 and -107 W provide energy of ions sufficient to maintain the effective rate of ion-stimulated desorption of the reaction products. The surface quality of the treated samples has been analyzed using atomic force microscopy.