Fractality and roughness of the ZnO:Cu composite thin films annealed in different temperatures

摘要

In this study, we co-sputtered zinc dioxide and copper in order to manufacture a composite thin film. We then used atomic force microscopy (AFM), scanning electron microscopy and energy-dispersive X-ray spectroscopy to investigate the surface morphology of samples. We annealed four samples to temperatures and for 90 minutes. Afterwards, we employed height distribution, roughness, permutation entropy(PE) and fractality of the height data from AFM to analyse samples theoretically. Our results reveal that although the roughness will increase by temperature and the multifractal spectrum widens by it; the PE does not change both from to and from to . Both PE and height distribution are changing meaningfully only in increasing the temperature from to .