Numerical optimization of the electrical characteristics of an EUV laser on 3p-3s transition in neonlike argon ions in low-inductance capillary-type discharge

摘要

Electrical characteristics of low-inductance capillary-type discharge have been determined by numerical model calculations, which ensure high efficiency of energy supply to a plasma column with an aspect ratio of 1: 100. The EUV argon laser based on this discharge provides a gain of g (+) > 1 cm(-1) on the operating transition and ensures single-pass spontaneous lasing with g (+) l > 25 (where l is the active medium length).