Hydrogenation in multicrystalline silicon: The impact of dielectric film properties and firing conditions

摘要

Abstract > Hydrogenation is a crucial step for improving the efficiency of multicrystalline silicon solar cells. In this work, we investigate the influence of different firing and annealing conditions on the efficacy of bulk hydrogenation in state‐of‐the‐art high‐performance multicrystalline silicon, for a range of hydrogen‐containing dielectric layers. All of the dielectric films studied, including aluminium oxide, amorphous silicon, and silicon nitride deposited with different tools, yield similar bulk lifetimes when annealed at optimal conditions. However, the optimal conditions vary between films, depending on the film properties. The overall hydrogenation effect does not appear to be affected by the cooling rate used during firing or by the application of illuminated annealing, performed at type="mathematics">250?°?C under 8 sun illumination. Moreover, we monitor in situ changes in the recombination behaviour of grain boundaries during the hydrogenation process, using a micro‐photoluminescence spectroscopy system with a temperature controlled stage. It is found that the hydrogenation reaction occurs at the annealing temperature range between type="mathematics">400?°?C and type="mathematics">500?°?C . </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> > 氢化是提高多晶硅太阳能电池效率的关键步骤。在这项工作中，我们研究了不同烧制和退火条件对散装高性能多晶硅硅效果的影响，用于一系列含氢介电层。研究的所有介电膜，包括用不同工具沉积的氧化铝，非晶硅和氮化硅，在最佳条件下退火时产生类似的体寿命。然而，取决于膜性能，薄膜之间的最佳条件变化。整体氢化效果似乎不受烧制期间使用的冷却速率的影响，或者通过施加照明退火，执行 type =“数学”> 250？°？c </ span> 在8岁以下的阳光照明下。此外，我们使用具有温度控制阶段的微光致发光光谱系统在氢化过程中监测晶界的重组行为的原位变化。发现氢化反应发生在退火温度范围内 <跨度类型=“数学”> 400？°？C </ SPAN> 和 <跨度类型=“数学”> 500？°？C </ SPAN> 。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-29870/'>《Progress in photovoltaics》</a> <b style="margin: 0 2px;">|</b><span>2020年第6期</span><b style="margin: 0 2px;">|</b><span>共10页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/7667.html" title="通信系统（传输系统）">通信系统（传输系统）;</a><a href="https://www.zhangqiaokeyan.com/clc/1790.html" title="光电子技术、激光技术">光电子技术、激光技术;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=firing&option=203" rel="nofollow">firing;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=grain boundaries&option=203" rel="nofollow">grain boundaries;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=hydrogen&option=203" rel="nofollow">hydrogen;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=multicrystalline silicon&option=203" rel="nofollow">multicrystalline silicon;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=recombination&option=203" rel="nofollow">recombination;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=silicon nitride&option=203" rel="nofollow">silicon nitride;</a> </p> <div class="translation"> 机译：射击;晶界;氢;多晶硅;重组;氮化硅; 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