Passivating electron‐selective contacts for silicon solar cells based on an a‐Si:H/TiO/i stack and a low work function metal

Cho Jinyoun; Melskens Jimmy; Debucquoy Maarten; Recamán Payo Maria; Jambaldinni Shruti; Bearda Twan; Gordon Ivan; Szlufcik Jozef; Kessels W.M.M.; Poortmans Jef

摘要

Abstract > In this work, the ATOM (intrinsic a‐Si:H/TiO <sub> x </sub> /low work function metal) structure is investigated to realize high‐performance passivating electron‐selective contacts for crystalline silicon solar cells. The absence of a highly doped Si region in this contact structure is meant to reduce the optoelectrical losses. We show that a low contact resistivity ( ρ <sub> c </sub> ) can be obtained by the combined effect of a low work function metal, such as calcium (Φ 2.9?eV), and Fermi‐level depinning in the metal‐insulator‐semiconductor contact structure (where in our case TiO <sub> x </sub> acts as the insulator on the intrinsic a‐Si:H passivating layer). TiO <sub> x </sub> grown by ALD is effective to achieve not only a low ρ <sub> c </sub> but also good passivation properties. As an electron contact in silicon heterojunction solar cells, inserting interfacial TiO <sub> x </sub> at the i‐a‐Si:H/Ca interface significantly enhances the solar cell conversion efficiency. Consequently, the champion solar cell with the ATOM contact achieves a V <sub>OC</sub> of 711?mV, FF of 72.9%, J <sub>SC</sub> of 35.1?mA/cm 2 , and an efficiency of 18.2%. The achievement of a high V <sub>OC</sub> and reasonable FF without the need for a highly doped Si layer serves as a valuable proof of concept for future developments on passivating electron‐selective contacts using this structure. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> > 在这项工作中，原子（内在A-Si：H / TIO <sub> x </ i> </ sub> /低功函数金属）结构进行了结构，实现用于晶体硅太阳能电池的高性能钝化电子选择性触点。在该接触结构中不存在高度掺杂的Si区，旨在降低光电损耗。我们表明低电阻率（ ρ</ i> <sub> c </ i> </ sub> ）通过低功函数金属的组合效果可以获得，例如钙（φ2.9≤ev）和金属 - 绝缘体 - 半导体接触结构中的费米级脱落（在我们的情况下TiO <sub> x </ i> </ sub> 作为内在A-Si：H钝化层上的绝缘体。 TIO. <sub> x </ i> </ sub> 由ALD成长是有效的，不仅达到低位 ρ</ i> <sub> c </ i> </ sub> 但也是良好的钝化特性。作为硅杂交太阳能电池中的电子接触，插入界面TiO <sub> x </ i> </ sub> 在I-A-Si：H / CA接口显着提高了太阳能电池转换效率。因此，具有原子接触的冠军太阳能电池实现了a v </ i> <sub> oc </ sub> 711？mv，ff为72.9％， j </ i> <sub> sc </ sub> 35.1？ma / cm 2 </ sup> ，效率为18.2％。实现高度 v </ i> <sub> oc </ sub> 合理的FF不需要高度掺杂的Si层用作有价值的概念证明，用于使用该结构钝化电子选择性触点的未来发展。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-29870/'>《Progress in photovoltaics》</a> <b style="margin: 0 2px;">|</b><span>2018年第10期</span><b style="margin: 0 2px;">|</b><span>共11页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Cho Jinyoun&option=202" target="_blank" rel="nofollow">Cho Jinyoun;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Melskens Jimmy&option=202" target="_blank" rel="nofollow">Melskens Jimmy;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Debucquoy Maarten&option=202" target="_blank" rel="nofollow">Debucquoy Maarten;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Recamán Payo Maria&option=202" target="_blank" rel="nofollow">Recamán Payo Maria;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Jambaldinni Shruti&option=202" target="_blank" rel="nofollow">Jambaldinni Shruti;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Bearda Twan&option=202" target="_blank" rel="nofollow">Bearda Twan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Gordon Ivan&option=202" target="_blank" rel="nofollow">Gordon Ivan;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Szlufcik Jozef&option=202" target="_blank" rel="nofollow">Szlufcik Jozef;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Kessels W.M.M.&option=202" target="_blank" rel="nofollow">Kessels W.M.M.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Poortmans Jef&option=202" target="_blank" rel="nofollow">Poortmans Jef;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>ESAT DepartmentK.U. LeuvenLeuven 3001 Belgium;</p> <p>Department of Applied PhysicsEindhoven University of TechnologyP.O. Box 513 5600 MB Eindhoven The Netherlands;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>imecKapeldreef 75 Leuven 3001 Belgium;</p> <p>Department of Applied PhysicsEindhoven University of TechnologyP.O. Box 513 5600 MB Eindhoven The Netherlands;</p> <p>ESAT DepartmentK.U. LeuvenLeuven 3001 Belgium;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/7667.html" title="通信系统（传输系统）">通信系统（传输系统）;</a><a href="https://www.zhangqiaokeyan.com/clc/1790.html" title="光电子技术、激光技术">光电子技术、激光技术;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=carrier‐selective&option=203" rel="nofollow">carrier‐selective;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=electron‐selective&option=203" rel="nofollow">electron‐selective;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=heterojunction&option=203" rel="nofollow">heterojunction;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=passivating contact&option=203" rel="nofollow">passivating contact;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=TiO x&option=203" rel="nofollow">TiO x;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=calcium&option=203" rel="nofollow">calcium;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=low work function metal&option=203" rel="nofollow">low work function metal;</a> </p> <div class="translation"> 机译：载体选择性;电子选择;异质结;钝化接触;TiO x;钙;低功函数金属; 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href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=何亮&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 何亮</a> <span> . 2014</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/061204093663.html">基于低功函数阳极金属的低开启电压GaN微波二极管及制备方法</a> <b>[P]</b> . <span> 中国专利： CN110729362B </span> <span> . 2020.11.10</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120103277375.html">基于低功函数阳极金属的低开启电压GaN微波二极管及制备方法</a> <b>[P]</b> . <span> 中国专利： CN110729362A </span> <span> . 2020-01-24</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130500458300.html">Composition for reducing work function of metal oxide-based electron-collection buffer layer, inverted organic solar cell using the same, and preparation method of the inverted organic solar cell</a> <b>[P]</b> . <span> 外国专利：  KR102287878B1 </span> <span> . 2021-08-10</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于减少金属氧化物基电子收集缓冲层，倒有机太阳能电池的作用作用的组合物，以及倒有机太阳能电池的制备方法 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130408721156.html">Composition for reducing work function of metal oxide-based electron-collection buffer layer inverted organic solar cell using the same and preparation method of the inverted organic solar cell</a> <b>[P]</b> . <span> 外国专利：  KR20170046877A </span> <span> . 2017-05-04</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于降低金属氧化物基电子收集缓冲层倒置有机太阳能电池功函数的组合物及其制备方法 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130420871058.html">SCHOTTKY BARRIER SOLAR CELLS WITH HIGH AND LOW WORK FUNCTION METAL CONTACTS</a> <b>[P]</b> . <span> 外国专利：  US2012285517A1 </span> <span> . 2012-11-15</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：具有高和低工作功能金属触点的肖特基势垒太阳能电池 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" onclick="ywcd('0704024604646','4',7,2,1,'',this,24)" class="delivery" prompt="010401" title="通过人工服务将文献原文发送至邮箱" >获取原文</div> <div class="journalsub-pop-up" style="display: none"> <div class="journal-sub"> <h2>期刊订阅</h2> <img 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