Wafer‐Scale Fabrication of Suspended Single‐Walled Carbon Nanotube Arrays by Silver Liquid Dynamics

Zhang Jian; Liu Siyu; Nshimiyimana Jean Pierre; Deng Ya; Hou Gu; Chi Xiannian; Hu Xiao; Zhang Zongzhi; Wu Pei; Wang Gongtang; Chu Weiguo; Sun Lianfeng

摘要

Abstract > Suspended single‐walled carbon nanotubes (SWNTs) have advantages in mechanical resonators and highly sensitive sensors. Large‐scale fabrication of suspended SWNTs array devices and uniformity among SWNTs devices remain a great challenge. This study demonstrates an effective, fast, and wafer‐scale technique to fabricate suspended SWNT arrays, which is based on a dynamic motion of silver liquid to suspend and align the SWNTs between the prefabricated palladium electrodes in high temperature annealing treatment. Suspended, strained, and aligned SWNTs are synthesized on a 2 × 2 cm 2 substrate with an average density of 10 tubes per micrometer. Under the optimal conditions, almost all SWNTs become suspended. A promising formation model of suspended SWNTs is established. The Kelvin four‐terminal resistance measurement shows that these SWNT array devices have extreme low contact resistance. Meanwhile, the suspended SWNT array field effect transistors are fabricated by selective etching of metallic SWNTs using electrical breakdown. This method of large‐scale fabrication of suspended architectures pushes the study of nanoscale materials into a new stage related to the electrical physics and industrial applications. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><abstract xmlns =“http://www.wiley.com/namespaces/wiley”type =“main”xml：lang =“en”> <title type =“main”>抽象</ title> >暂停单个-WALLED碳纳米管（SWNT）具有机械谐振器和高敏感传感器的优点。大规模制造悬浮的SWNT阵列设备和SWNT设备中的均匀性仍然是一个很大的挑战。本研究展示了一种有效，快速，晶片级技术，用于制造悬浮的SWNT阵列，其基于银液的动态运动悬挂并在高温退火处理中悬挂在预制的钯电极之间的SWNT。悬浮，应变和对齐的SWNT在2×2cm 2粒中合成，平均密度为每微米10个管。在最佳条件下，几乎所有SWNT都暂停了。建立了悬浮瑞斯的有希望的形成模型。开尔文四端电阻测量表明，这些SWNT阵列装置具有极端的低接触电阻。同时，通过使用电击穿选择性蚀刻金属SWNT来制造悬浮的SWNT阵列场效应晶体管。这种悬浮架构的大规模制造方法将纳米级材料的研究推动到与电物理和工业应用有关的新阶段。 </ p> </ abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-28247/'>《Small》</a> <b style="margin: 0 2px;">|</b><span>2017年第40期</span><b style="margin: 0 2px;">|</b><span>共1页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zhang Jian&option=202" target="_blank" rel="nofollow">Zhang Jian;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Liu Siyu&option=202" target="_blank" rel="nofollow">Liu Siyu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Nshimiyimana Jean Pierre&option=202" target="_blank" rel="nofollow">Nshimiyimana Jean Pierre;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Deng Ya&option=202" target="_blank" rel="nofollow">Deng Ya;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Hou Gu&option=202" target="_blank" rel="nofollow">Hou Gu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Chi Xiannian&option=202" target="_blank" rel="nofollow">Chi Xiannian;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Hu Xiao&option=202" target="_blank" rel="nofollow">Hu Xiao;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zhang Zongzhi&option=202" target="_blank" rel="nofollow">Zhang Zongzhi;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wu Pei&option=202" target="_blank" rel="nofollow">Wu Pei;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wang Gongtang&option=202" target="_blank" rel="nofollow">Wang Gongtang;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Chu Weiguo&option=202" target="_blank" rel="nofollow">Chu Weiguo;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Sun Lianfeng&option=202" target="_blank" rel="nofollow">Sun Lianfeng;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>School of Physics and ElectronicsShandong Normal UniversityJinan 250014 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> <p>CAS Key Laboratory of Nanosystem and Hierarchical FabricationUniversity of Chinese Academy of SciencesBeijing 100190 China;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=annealing&option=203" rel="nofollow">annealing;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=field effect transistors&option=203" rel="nofollow">field effect transistors;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=single‐walled carbon nanotube&option=203" rel="nofollow">single‐walled carbon nanotube;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=suspended arrays&option=203" rel="nofollow">suspended arrays;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=wafer scale&option=203" rel="nofollow">wafer scale;</a> </p> <div class="translation"> 机译：退火;场效应晶体管;单壁碳纳米管;悬浮阵列;晶圆刻度; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704024267066.html">Wafer‐Scale Fabrication of Suspended Single‐Walled Carbon Nanotube Arrays by Silver Liquid Dynamics</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zhang Jian&option=202" target="_blank" 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