Three-Mask Elevated-Metal Metal-Oxide Thin-Film Transistor Technology for High-Resolution AMOLED Application

摘要

Incorporated with the self-aligned definition of the active island, a one-mask-reduced elevated-metal metal-oxide (EMMO) thin-film transistor (TFT) with thermally-induced source/drain regions was proposed for high-resolution AMOLED application. Such three-mask EMMO TFT combines the advantages of small device footprint, low manufacture cost, reduced overlap parasitic capacitance and good device characteristics.