Invar Fe-Ni Alloy Metallization by Electroless Plating for TFTs

摘要

We prepared an Fe-Ni alloy film with a CTE equivalent to that of glass substrate for TFT using electroless plating. The electroless deposited Fe-Ni alloy films with Fe contents of 55 and 64 wt% in the invar composition range had CTE values of 8 ppm/°C which is lower than that of Ni films and comparable with that of glass substrate.