Aluminum Hydroxocarboxylates in Solution Deposition of Planarization Alumina Films

摘要

Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming agents, to obtain precursor solutions for chemical deposition of smooth amorphous alumina films on metal substrates.