Structure and Phase Formation in the Mo–Si–Al–Zr–N System during the Formation of Arc-PVD Coatings and Their Properties

摘要

The structure, composition, physicomechanical properties, tribological properties, and heat resistance of arc-PVD Mo–Si–Al–Zr–N coatings are studied. The coatings contain nitrides ZrN, Mo~(2)N, Si~(3)N~(4), and AlN. The coatings have a multilayer structure with a modulation period of 40–45 nm and a crystallite size of 10–15 nm; a hardness of 43 GPa; and parameters H ~( IT )/ E ~( IT )and $${{H_{{IT}}^{3}} mathord{left/ {phantom {{H_{{IT}}^{3}} {E_{{IT}}^{2}}}} ight. kern-0em} {E_{{IT}}^{2}}}$$ of 0.09 and 0.38 GPa, respectively. Samples with the coatings undergo oxidation without substrate exposure upon heating in air at a temperature up to 600°C. The coatings have high wear resistance and a high friction coefficient (~0.97) at elevated temperatures and exhibit cohesion fracture in scratching tests.