Exceptional straightness of travel stage using real-time compensation

摘要

With the ongoing trend of miniaturization of the semiconductor manufacturing process, better velocity stability and straightness of travel are required for stages used in semiconductor equipment such as an exposure machine and defect inspection machine. In this article, we will introduce NSK's newly developed stage, which achieves exceptional straightness of travel while incorporating a non-contact stage and fine motion stage with real-time error compensation. Our new stage meets the needs and requirements of the semiconductor manufacturing and processing market.