A robust rotation-invariance displacement measurement method for a micro-/nano-positioning system

摘要

A robust and high-precision displacement measurement method for a compliant mechanism-based micro-/nano-positioning system is proposed. The method is composed of an integer-pixel and a sub-pixel matching procedure. In the proposed algorithm (Pro-A), an improved ring projection transform (IRPT) and gradient information are used as features for approximating the coarse candidates and fine locations, respectively. Simulations are conducted and the results show that the Pro-A has the ability of rotation-invariance and strong robustness, with a theoretical accuracy of 0.01 pixel. To validate the practical performance, a series of experiments are carried out using a computer micro-vision and laser interferometer system (LIMS). The results demonstrate that both the LIMS and Pro-A can achieve high precision, while the Pro-A has better stability and adaptability.