Pre-treatment for preventing degradation of measurement accuracy from speckle noise in speckle interferometry

摘要

Speckle interferometers, which can measure three-dimensional deformations with the same sensitivity in each direction of a three-dimensional axis, have been employed in the industry. However, the measurement results of a complex shape deformation using this method do not always produce a smooth phase map due to the influence of speckle noise. In this paper, this problem that occurs with speckle noise, which is included in the speckle pattern, is discussed. In addition, the solution to the problem concerning speckle noise is discussed. An idea for noise reduction is proposed by using a simple speckle pattern intensity distribution model based on the interferometry. It is confirmed that the proposed method can reduce the influence of speckle noise to 1/1000 of the light source wavelength. (C) 2018 Elsevier Ltd. All rights reserved.