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PMMA microfluidic chip fabrication using laser ablation and low temperature bonding with OCA film and LOCA

机译:PMMA微流体芯片采用激光烧蚀和低温粘合与OCA薄膜和基因座

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摘要

A new PMMA microfluidic chip fabrication method by combining laser ablation technology with low-temperature bonding using optically clear adhesive (OCA) film and liquid optically clear adhesive (LOCA) was presented in this paper. The deformation and clogging issues of the microfluidic channel were well solved. The effective bonding area ratio of microfluidic chips could be greatly improved by adjusting bonding temperature and bonding time. The crevices around the microchannels were effectively eliminated by coating treatment of LOCA. The bonding strength and waterproof of PMMA microfluidic chips coating with/without LOCA were also evaluated in this paper.
机译:本文提出了一种新的PMMA微流体芯片制造方法,通过使用光学透明粘合剂(OCA)薄膜和液晶透明粘合剂(LOCA)将激光烧蚀技术与低温粘合组合。 微流体通道的变形和堵塞问题很好解决。 通过调节粘合温度和键合时间,可以大大提高微流体芯片的有效粘合面积比。 通过涂覆基因座的涂覆处理有效地消除了微通道周围的裂缝。 本文还评价了PMMA微流体芯片涂层的粘接强度和防水。

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  • 来源
    《Microsystem technologies》 |2017年第6期|共6页
  • 作者单位

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

    Wuhan Text Univ Coll Elect &

    Elect Engn Text Ind Chain Collaborat Gener Technol Innovat C Wuhan 430200 Hubei Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路(IC);
  • 关键词

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