INNOVATIVE DIRECT LASER INTERFERENCE PATTERNING TECHNIQUE USED FOR PRODUCTION OF 2D, 2.5D, AND 3D MICROSTRUCTURES

摘要

By periodically patterning surfaces, it is possible to obtain specific functionality of the patterned object. This is often used in applications ranging from sensor systems and photonics to biomaterials, and can be used to control and thereby reduce wear and friction between materials. Hence, there are various techniques which are used to create patterns with sizes ranging from micro to nanoscale, such as optical lithography or laser etching. However, the specific technique is typically tailored to the type of the processed material and is not compatible with different material types.