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首页> 外文期刊>Central European Journal of Physics >Laser scribing on HOPG for graphene stamp printing on silicon wafer
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Laser scribing on HOPG for graphene stamp printing on silicon wafer

机译:在HOPG上进行激光刻划,以在硅片上进行石墨烯印模印刷

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摘要

Highly oriented pyrolytic graphite (HOPG) was scribed by pulsed laser beam to produce square patterns. Patterning of HOPG surface facilitates the detachment of graphene layers during contact printing. Direct HOPG-to-substrate and glue-assisted stamp printing of a few-layers graphene was compared. Printed graphene sheets were visualized by optical and scanning electron microscopy. The number of graphene layers was measured by atomic force microscopy. Glue-assisted stamp printing allows printing relatively large graphene sheets (40×40 μm) onto a silicon wafer. The presented method is easier to implement and is more flexible than the majority of existing ways of placing graphene sheets onto a substrate.
机译:通过脉冲激光束划刻高度取向的热解石墨(HOPG)以产生正方形图案。 HOPG表面的图案化有助于在接触印刷过程中石墨烯层的分离。比较了几层石墨烯的直接HOPG到基材和胶粘的邮票印刷。通过光学和扫描电子显微镜观察印刷的石墨烯片。石墨烯层的数量通过原子力显微镜法测量。胶辅助印模印刷允许将相对较大的石墨烯片(40×40μm)印刷到硅晶片上。所提出的方法比将石墨烯片材放置到衬底上的大多数现有方式更易于实现并且更灵活。

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