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首页> 外文期刊>Advanced Science Letters >Growth of La_(0.7)Sr_(0.3)MnO_3 Thin-Films on SrTiO_3 (100) Substrate by Pulsed Laser Deposition: Structural, Optical and Electrical Properties
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Growth of La_(0.7)Sr_(0.3)MnO_3 Thin-Films on SrTiO_3 (100) Substrate by Pulsed Laser Deposition: Structural, Optical and Electrical Properties

机译:La_(0.7)Sr_(0.3)MnO_3薄膜在SrTiO_3(100)衬底上的脉冲激光沉积生长:结构,光学和电学性质

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摘要

This paper reports the growth and properties of La_(0.7)Sr_(0.3)MnO_3 (LSMO) thin films on SrTiO_3 (100) perovskite single crystal substrates via pulsed laser deposition (PLD) process using Kr:F (λ = 248 nm) laser line as an exciton source. The SrTiO_3 (100) perovskite single crystal was used as substrate due to its good lattice matching with the deposited thin films (La_(0.7)Sr_(0.3)MnO_3). The LSMO thin films were deposited at without oxygen pressure and other two different oxygen pressures, i.e., at 100 mTorr and at 300 mTorr oxygen pressures. For the deposition of thin films, the target material was prepared by mixing and sintering the exact amounts of manganese oxide (Mn_3O_4), strontium oxide (SrCO_3) and lanthanum oxide (La_2O_3). Finally, a sintered pellet of La_(0.7)Sr_(0.3)MnO_3 was used as a target for the deposition of the thin films. The as-grown LSMO thin films were characterized in terms of their structural, optical and electrical properties.
机译:本文通过使用Kr:F(λ= 248 nm)激光的脉冲激光沉积(PLD)工艺报道了SrTiO_3(100)钙钛矿单晶衬底上La_(0.7)Sr_(0.3)MnO_3(LSMO)薄膜的生长和性能线作为激子源。由于SrTiO_3(100)钙钛矿单晶与沉积的薄膜(La_(0.7)Sr_(0.3)MnO_3)具有良好的晶格匹配,因此将其用作衬底。 LSMO薄膜是在没有氧气压力和其他两种不同氧气压力的情况下,即在100mTorr和300mTorr氧气压力下沉积的。为了沉积薄膜,通过混合和烧结精确量的氧化锰(Mn_3O_4),氧化锶(SrCO_3)和氧化镧(La_2O_3)来制备目标材料。最后,将La_(0.7)Sr_(0.3)MnO_3的烧结小球用作沉积薄膜的靶。生长中的LSMO薄膜通过结构,光学和电学特性进行了表征。

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