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机译:用于RF应用的压电铝氮化物微机电系统谐振器
Shri Ramdeobaba College of Engineering and Management Affiliated to Rashtrasant Tukadoji Maharaj Nagpur University;
Shri Ramdeobaba College of Engineering and Management Affiliated to Rashtrasant Tukadoji Maharaj Nagpur University;
Shri Ramdeobaba College of Engineering and Management Affiliated to Rashtrasant Tukadoji Maharaj Nagpur University;
Shri Ramdeobaba College of Engineering and Management Affiliated to Rashtrasant Tukadoji Maharaj Nagpur University;
MEMS; CMV; LFE; Quality factor; RF;
机译:用于RF应用的压电铝氮化物微机电系统谐振器
机译:基于微机电系统的振动能量收割机,脉冲直流磁控溅射沉积氮化铝压电薄膜
机译:体声谐振器应用的钼底电极和压电氮化铝膜的脉冲直流溅射
机译:适用于UHF应用的低运动阻力环形轮廓模式氮化铝压电微机械谐振器
机译:用于定时和频率控制应用的温度补偿和高Q压电铝氮化物振荡器谐振器
机译:用于压电应用的氮化铝(002)薄膜的反应溅射:综述
机译:压电铝氮化物谐振器的建模与制造及其在振荡器中的应用