Activity of technical groups in APPIE: Clean Technology Group

摘要

The Clean Technology Group started in 1990 to study problems relating to the contamination of clean rooms. The industries with such problems extend from semiconductors and liquid crystals to Pharmaceuticals and hospitals. Some examples of the problems are:(i) Clean technology of super-clean environments in processing densely accumulated and highly minute semiconductors.(ii) Contamination control for chemical pollutants. (iii) Validation of cleanness in food and pharmaceutical industries.