The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

摘要

The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.