High-Speed Vacuum Evaporation of Large-Area Targets by a Focused Electron Beam

摘要

A method of electron-beam evaporation of a target in a vacuum of similar to 10(-2) Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an angular velocity of 8-80 rad/s by means of a ring sweep in the frequency range of 50-500 Hz. Then, by radial displacement with a linear velocity of 10-100 mm/s, the spot is guided over a spiral path from the edge of the target to its center. Due to spiral scanning, the spot runs across the entire target surface with a much larger area in 0.1-1.0 s and rapidly vaporizes the target.