Voltage-induced switching dynamics based on an AZO/VO 2/AZO sandwiched structure

摘要

Highlights?Voltage-induced switching dynamics of VO2thin film is proposed.?Optical modulation has been studied based on AZO/VO2/AZO sandwiched structure.?The phase transition voltage decreases with increasing temperature.AbstractA vanadium dioxide (VO2) thin film was prepared on an Al-doped ZnO (AZO) conductive glass substrate by DC magnetron sputtering and a post-annealing process. The AZO/VO2/AZO sandwiched structure was fabricated on the VO2/AZO composite film using photolithography and a chemical etching process. The composition, microstructure and optical properties of the VO2/AZO composite film were tested. The results showed that the VO2/AZO composite film was poly-crystalline and the AZO layer did not change the preferred growth orientation of VO2. When the voltage was applied on both o