Aluminium nitride piezoelectric harvester with record power output drives sensor

摘要

A wireless sensor node, which is powered by a piezoelectric energy harvesting device made of silicon and aluminium nitride, has been developed by Imec of Leuven, Belgium, and the Hoist Centre of Eindhoven. The Netherlands. Fabricated using microelectro-mechanical systems (MEMS) processes, the harvesting device generates what Imec claims to be a world record 85 μW of power.