Nanoscale Ferromagnetic Cobalt‐Doped ZnO Structures Formed by Deep‐UV Direct‐Patterning

Yeh Chun‐Cheng; Colis Silviu; Fioux Philippe; Zan Hsiao‐Wen; Berling Dominique; Soppera Olivier

摘要

Abstract >Cobalt (II) acetate is mixed with zinc methacrylate (ZnMAA) to form a photopatternable Co‐doped zinc oxide precursor. By using deep‐UV (DUV) interference lithography, Co‐doped ZnMAA precursor can be patterned as negative tone resist and transformed into ferromagnetic Co:ZnO films after thermal treatment. Moreover, Co:ZnO patterns as small as 300 nm line‐width can be easily obtained. To have an in‐depth understanding to the effect of DUV‐patterning process as well as thermal annealing on Co:ZnO films derived from Co‐doped ZnMAA precursor, optical, magnetic, and electrical characterizations are performed on Co:ZnO films prepared in different conditions. For the Co:ZnO film prepared without DUV‐patterning, large zero‐field‐cooling (ZFC)–field‐cooling (FC) irreversibility appears in superconducting quantum interference device measurements after vacuum annealing, indicating that Co clusters have formed inside the film. On the other hand, no ZFC–FC bifurcation can be observed for the DUV‐patterned Co:ZnO film after the vacuum annealing, suggesting that the uniformity of Co ion distribution inside ZnO lattice is improved by DUV‐patterning. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> 乙酸钴（II）与甲基丙烯酸锌（ZnMaa）混合以形成光视图主的共掺杂氧化锌前体。通过使用深紫外（DUV）干扰光刻，共掺杂的ZnMaA前体可以被图案化为负色调抗蚀剂，并在热处理后转化成铁磁CO：ZnO膜。此外，可以容易地获得CO：ZnO图案小于300nm线宽。要深入了解Duv-Patterning方法以及在CO：源自共掺杂的ZnMaa前体的ZnO膜的ZnO膜，光学，磁性和电学表征在不同的情况下进行CO：ZnO薄膜状况。对于CO：没有Duv-Patterning制备的ZnO膜，在真空退火后的超导量子干扰装置测量中出现大的零场冷却（ZFC） - 野冷却（Fc）不可逆转性，表明在膜内形成CO簇。另一方面，对于真空退火后，无ZFC-FC分叉分叉分叉可以观察到ZFC-FC分叉分叉膜，表明通过DUV - 图案化改善了ZnO晶格内的Co离子分布的均匀性。</ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-18063/'>《Advanced materials interfaces》</a> <b style="margin: 0 2px;">|</b><span>2017年第22期</span><b style="margin: 0 2px;">|</b><span>共8页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Yeh Chun‐Cheng&option=202" target="_blank" rel="nofollow">Yeh Chun‐Cheng;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Colis Silviu&option=202" target="_blank" rel="nofollow">Colis Silviu;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Fioux Philippe&option=202" target="_blank" rel="nofollow">Fioux Philippe;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zan Hsiao‐Wen&option=202" target="_blank" rel="nofollow">Zan Hsiao‐Wen;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Berling Dominique&option=202" target="_blank" rel="nofollow">Berling Dominique;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Soppera Olivier&option=202" target="_blank" rel="nofollow">Soppera Olivier;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Institut de Science des Matériaux de Mulhouse (IS2M)Université de Haute Alsace15 rue Jean Starcky Mulhouse 68057 France;</p> <p>IPCMS – Département de Chimie et des Matériaux Inorganiques (DCMI)Université de Strasbourg23 Rue du Loess Strasbourg 67200 France;</p> <p>Institut de Science des Matériaux de Mulhouse (IS2M)Université de Haute Alsace15 rue Jean Starcky Mulhouse 68057 France;</p> <p>Department of Photonics and Institute of Electro‐Optical EngineeringNational Chiao Tung UniversityHsinchu Taiwan 30010 Republic of China;</p> <p>Institut de Science des Matériaux de Mulhouse (IS2M)Université de Haute Alsace15 rue Jean Starcky Mulhouse 68057 France;</p> <p>Institut de Science des Matériaux de Mulhouse (IS2M)Université de Haute Alsace15 rue Jean Starcky Mulhouse 68057 France;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=diluted magnetic semiconductor&option=203" rel="nofollow">diluted magnetic semiconductor;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=doping&option=203" rel="nofollow">doping;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=nanostructure&option=203" rel="nofollow">nanostructure;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=photopatterning&option=203" rel="nofollow">photopatterning;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=ZnO&option=203" rel="nofollow">ZnO;</a> </p> <div class="translation"> 机译：稀释磁半导体;掺杂;纳米结构;photopterning;zno; </div> </li> </ul> </div> </div> <div class="literature cardcommon" id="literaturereference" style="display:none"> <div class="similarity "> <h3 class="all_title" id="enpatent111">引文网络</h3> <div class="referencetab clearfix"> <ul id="referencedaohang"> <li dataid="referenceul">参考文献</li> <li dataid="citationul">引证文献</li> <li dataid="commonreferenceul">共引文献</li> <li dataid="commoncitationul">同被引文献</li> <li dataid="tworeferenceul">二级参考文献</li> <li dataid="twocitationul">二级引证文献</li> </ul> </div> <div class="reference_details" id="referenceList"> <ul id="referenceul"></ul> <ul id="citationul"></ul> <ul id="commonreferenceul"></ul> <ul id="commoncitationul"></ul> <ul id="tworeferenceul"></ul> <ul id="twocitationul"></ul> </div> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704022435908.html">Nanoscale Ferromagnetic Cobalt‐Doped ZnO Structures Formed by Deep‐UV Direct‐Patterning</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Yeh Chun‐Cheng&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Yeh Chun‐Cheng,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Colis Silviu&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Colis Silviu,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Fioux Philippe&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Fioux Philippe,</a> <a href="/journal-foreign-18063/" target="_blank" rel="nofollow" class="tuijian_authcolor">Advanced materials interfaces .</a> <span>2017</span><span>,第22期</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：深紫色直接图案化形成纳米级铁磁钴掺杂ZnO结构</span> </p> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/070409905870.html">Photo electrical and optical anomaly in ferromagnetic cobalt doped ZnO nanostructures</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zia Amir&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Zia Amir,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ahmed S.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Ahmed S.,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Shah N. 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href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=才让措&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,才让措</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=陈万军&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,陈万军</a> <span> <a href="/journal-cn-7663/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 功能材料 </a> </span> <span> . 2018</span><span>,第004期</span> </span> </div> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/academic-journal-cn_materials-reports_thesis/0201211438471.html">Mn与N共掺ZnO铁磁稳定性及其电子结构的第一性原理研究</a> <b>[J]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=吴孔平&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 吴孔平</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=顾书林&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,顾书林</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=朱顺明&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,朱顺明</a> <span> <a href="/journal-cn-7645/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 材料导报 </a> </span> <span> . 2013</span><span>,第012期</span> </span> </div> </li> <li> <div> <b>6. </b><a class="enjiyixqcontent" href="/academic-conference-cn_meeting-1136_thesis/0202277509.html">钴掺杂氧化锌铁磁性的第一性原理计算</a> <b>[C]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=陈春天&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 陈春天</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=郭春雨&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,郭春雨</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=侯俊杰&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,侯俊杰</a> <span> <a href="/conference-cn-1136/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 第十五届全国工程电介质学术会议 </a> <span> <span> . 2015</span> </span> </div> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/academic-degree-domestic_mphd_thesis/020312747640.html">低维钴掺杂ZnO纳米材料结构和发光性质的研究</a> <b>[A] </b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=郑爽&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 郑爽</a> <span> . 2012</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/061203977449.html">基于受控小孔形成的纳米级图案化的方法</a> <b>[P]</b> . <span> 中国专利： CN109153160B </span> <span> . 2020.09.01</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120100614037.html">基于受控小孔形成的纳米级图案化的方法</a> <b>[P]</b> . <span> 中国专利： CN109153160A </span> <span> . 2019-01-04</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130437794594.html">composition, use of a doped or reduced thio2 / z, methods for increasing the effectiveness of an organic UV sunscreen composition and the UV spectrum of a sunscreen formulation, and methods for reducing the protection of a toxic compound in an uv sunscreen composition and the adverse effects of thio2 and / or zno on one or more components of a composition</a> <b>[P]</b> . <span> 外国专利：  BRPI0412199A </span> <span> . 2006-08-22</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：组合物，掺杂或还原的thio2 / z的用途，提高有机UV防晒剂组合物的有效性和防晒剂配方的UV光谱的方法以及减少uv防晒剂组合物中对有毒化合物的保护的方法及其不利因素硫代和/或zno对组合物中一种或多种组分的影响 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130437807492.html">The composition of UV sunscreen, use of a TiO2 / ZnO doped or reduced, methods to increase the efficiency of a composition of solar UV filter organicAnd to reduce the production of toxic compounds in a composition of solar UV filter.</a> <b>[P]</b> . <span> 外国专利：  BR0317753A </span> <span> . 2005-11-22</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：紫外线防晒剂的成分，使用掺杂或还原的TiO2 / ZnO，可以提高太阳能紫外线滤光剂有机成分的效率，并减少太阳能紫外线滤光剂成分中有毒化合物的产生。 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130412086082.html">PROCESS FOR SYNTHESIS OF TB DOPED ZNO NANOPARTICLES FOR TOTAL CONTROL OVER THE UV TO GREEN LUMINESCENCE (GL) INTENSITY RATIO AND THE TUNABILITY OF UV LUMINESCENCE (UVL)''</a> <b>[P]</b> . <span> 外国专利：  IN274497B </span> <span> . 2016-07-29</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> 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