Atomic Layer Deposition of Titanium Phosphate from Titanium Tetrachloride and Triethyl Phosphate onto Carbon Fibers

Militzer Christian; Buchsbaum Julia; Dzhagan Volodymyr; Zahn Dietrich R. T.; Wulff Harm; Helm Christiane A.; Goedel Werner A.

摘要

Abstract > A thermal atomic layer deposition (ALD) process for depositing titanium phosphate onto bundles of carbon fibers as well as flat silicon and germanium substrates using titanium tetrachloride and triethyl phosphate as precursors is presented. This process yields conformal coatings on all substrates used while having a growth per cycle of 0.22 nm cycle ?1 , which is relatively high compared to other metal phosphate ALD processes. The reactions of the precursors with the surface are shown to be self‐limiting at 200 °C. Compositional analysis of the coating is performed using energy‐dispersive X‐ray spectroscopy, X‐ray photoelectron spectroscopy, and Fourier‐transform infrared spectroscopy. It is shown that the as‐deposited coating has a chemical composition of Ti <sub>3.0</sub> PO <sub>8.2</sub> and a residual carbon content of 7%. Upon thermal annealing in air, residual triethyl phosphate and water is lost from the coating and phosphate can be identified up to 1000 °C. At temperatures exceeding 1000 °C, the coating starts to decompose. Thermogravimetric analysis of coated carbon fibers shows that the coating increases the onset temperature of the carbon fiber oxidation, thus providing an oxidation protection to the fibers. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> > 通过将四氯化钛和三乙酯作为前体施用用于将磷酸钛和晶硅和锗基板沉积到碳纤维束上的热原子层沉积（ALD）方法。该方法在每个循环循环的同时使用的所有基材上产生共形涂层？1 </ sup> 与其他金属磷酸酯ALD工艺相比相对较高。前体与表面的反应显示在200℃下自限制。使用能量分散X射线光谱，X射线光电子体光谱和傅立叶变换红外光谱进行涂层的组成分析。结果表明，沉积的涂层具有Ti的化学成分 <sub> 3.0 </ sub> 宝 <sub> 8.2 </ sub> 和残留的碳含量为7％。在空气中的热退火时，从涂层中损失残留的三乙酯和水，磷酸盐可以鉴定为1000℃。在超过1000℃的温度下，涂层开始分解。涂层碳纤维的热重分析表明，涂层增加了碳纤维氧化的起始温度，从而为纤维提供氧化保护。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-18063/'>《Advanced materials interfaces》</a> <b style="margin: 0 2px;">|</b><span>2018年第16期</span><b style="margin: 0 2px;">|</b><span>共11页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Militzer Christian&option=202" target="_blank" rel="nofollow">Militzer Christian;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Buchsbaum Julia&option=202" target="_blank" rel="nofollow">Buchsbaum Julia;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Dzhagan Volodymyr&option=202" target="_blank" rel="nofollow">Dzhagan Volodymyr;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Zahn Dietrich R. T.&option=202" target="_blank" rel="nofollow">Zahn Dietrich R. T.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wulff Harm&option=202" target="_blank" rel="nofollow">Wulff Harm;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Helm Christiane A.&option=202" target="_blank" rel="nofollow">Helm Christiane A.;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Goedel Werner A.&option=202" target="_blank" rel="nofollow">Goedel Werner A.;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Physical ChemistryChemnitz University of TechnologyStra?e der Nationen 62 09111 Chemnitz Germany;</p> <p>Physical ChemistryChemnitz University of TechnologyStra?e der Nationen 62 09111 Chemnitz Germany;</p> <p>Semiconductor PhysicsChemnitz University of TechnologyReichenhainer Stra?e 70 09126 Chemnitz Germany;</p> <p>Semiconductor PhysicsChemnitz University of TechnologyReichenhainer Stra?e 70 09126 Chemnitz Germany;</p> <p>Soft Matter and BiophysicsErnst‐Moritz‐Arndt University of GreifswaldFelix‐Hausdorff‐Str. 6 17487 Greifswald Germany;</p> <p>Soft Matter and BiophysicsErnst‐Moritz‐Arndt University of GreifswaldFelix‐Hausdorff‐Str. 6 17487 Greifswald Germany;</p> <p>Physical ChemistryChemnitz University of TechnologyStra?e der Nationen 62 09111 Chemnitz Germany;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=atomic layer deposition&option=203" rel="nofollow">atomic layer deposition;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=carbon fibers&option=203" rel="nofollow">carbon fibers;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=coatings&option=203" rel="nofollow">coatings;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=thin films&option=203" rel="nofollow">thin films;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=titanium phosphate&option=203" rel="nofollow">titanium phosphate;</a> </p> <div class="translation"> 机译：原子层沉积;碳纤维;涂层;薄膜;磷酸钛; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704022433685.html">Atomic Layer Deposition of Titanium Phosphate from Titanium Tetrachloride and Triethyl Phosphate onto Carbon Fibers</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Militzer Christian&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Militzer Christian,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Buchsbaum Julia&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Buchsbaum Julia,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Dzhagan Volodymyr&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Dzhagan Volodymyr,</a> <a href="/journal-foreign-18063/" target="_blank" rel="nofollow" class="tuijian_authcolor">Advanced materials interfaces .</a> <span>2018</span><span>,第16期</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：从四氯化钛和三乙酯上磷酸钛的原子层沉积在碳纤维上</span> </p> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/academic-journal-foreign_thin-solid-films_thesis/0204122289902.html">Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition</a> <b>[J]</b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ylivaara Oili M. 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Dobbelaere&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">T. Dobbelaere,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=F. Mattelaer&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">F. Mattelaer,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=J. Dendooven&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">J. Dendooven,</a> <a href="/conference-foreign-283601/" target="_blank" rel="nofollow" class="tuijian_authcolor">PRiME Joint International Meeting of the Electrochemical Society, the Electrochemical Society of Japan, and the Korean Electrochemical Society .</a> <span>2016</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：等离子体增强铁和磷酸钛的原子层沉积作为3D结构锂离子微滴乳的电极材料</span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/academic-degree-foreign_mphd_thesis/02061389639.html">Synthesis and characterization of titanium carbide, titanium boron carbonitride, titanium boride/titanium carbide and titanium carbide/chromium carbide multilayer coatings by reactive and ion beam assisted, electron beam-physical vapor deposition (EB-PVD).</a> <b>[D] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wolfe, Douglas Edward.&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Wolfe, Douglas Edward. </a> <span>2001</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：通过反应和离子束辅助，电子束物理气相沉积（EB-PVD）合成和表征碳化钛，碳氮化钛硼，硼化钛/碳化钛和碳化钛/碳化铬多层涂层。</span> </p> </li> <li> <div> <b>6. </b><a class="enjiyixqcontent" href="/academic-journal-foreign-pmc_detail_thesis/040006912153.html">Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl4) Precursor</a> <b>[O] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Woo-Jae Lee&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Woo-Jae Lee,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Eun-Young Yun&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Eun-Young Yun,</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Han-Bo-Ram Lee&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">Han-Bo-Ram Lee,</a> <span>2020</span> </span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：通过等离子体增强的原子层沉积使用四甲基（二甲基氨基）钛（TDMAT）和四氯化钛（TiCl4）前体制备的锡薄膜的数据集</span> </p> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/open-access_resources_thesis/01000125985569.html">Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition</a> <b>[O] </b> . <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Oili M.E. 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