Synthesis of As-grown superconducting MgB_2 thin films by sputtering method

摘要

As-grown superconducting MgB_2 thin films were prepared by very simple RF sputtering method using a single target without post-annealing process. A two-component target comprising of many small chunks of B on a Mg disk was used. The films were deposited onto polished single crystal sapphire (R-plane) or SrTiO_3 (111) substrates at rather low temperatures ranging from 100 to 110 deg C. Five samples on SrTiO_3 substrate and one on sapphire showed zero resistivity at about 15 K and onset at about 20 K with measuring the resistance versus temperature (R-T curves) and the current versus voltage curves (I-V curve).