Fabrication of YBa_2Cu_3O_(7-x) film by metalorganic deposition method using trifluoroacetates and its process conditions

摘要

Fabrication of YBa_2Cu_3O_(7-x)(YBCO) superconductors by the metalorganic deposition (MOD) method has many advantages: precise controllability of metal components, wide flexibility to coating objects, and low-cost non-vacuum approach. We succeeded in the preparation of a high-quality coating solution that enables us to obtain YBCO films having high critical currents (I_c). We also investigated processing conditions: proper control of water vapor in furnace, suppression of the reaction between substrate and fluoride during heat treatments, and other process conditions. By their optimization, we can successfully fabricate the films, which has critical current density (J_c) of 4.6 MA/cm~2 at 77 K, 0 T. The results show the potentiality of the metalorganic deposition method using trifluoroacetates (TFA-MOD method) for high-temperature superconductor applications.