PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

摘要

Ni-Cr and Fe-Cr-Al films deposited on the Al_2O_3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance valve on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2 X 10~(-4) Pa, respectively.