Investigation of conical anode - disc cathode ion source

摘要

An axial direct-current conical anode - disc cathode ion source has been designed, constructed, and operated. The electrical discharge and the output ion beam characteristics are measured using nitrogen gas. It is found that at the optimum dimensions, pressure equal to 4.5 x 10(-5) mm Hg and discharge current equal to 250 mu A, a maximum output ion beam current equal to 91 mu A can be obtained. A comparison between the experimental results and theoretical calculations of the output ion beam current values at the optimum dimensions and operating parameters for different discharge current of conical anode and disc cathode ion source using nitrogen gas is determined. It is found that a good agreement exists between the experimental results and theoretical calculations.