Synthesis and material characterization of amorphous and crystalline (alpha-) Al2O3 via aerosol assisted chemical vapour deposition

摘要

The facile synthesis of Al2O3 in the amorphous and corundum phase on both glass and quartz substrates is reported. The synthesis was carried out via aerosol assisted chemical vapour deposition using Al(acac)(3) and methanol. The films were analyzed using XRD, SEM, UV-vis spectroscopy and XPS. The coatings were highly crystalline (when annealed) with low carbon contamination levels and a relatively featureless morphology that gave rise to ultra high transparency in the UV, visible and near IR portions of the electromagnetic spectrum.