Investigation of ZnO Thin Film Synthesized by Spray Pyrolysis Method as a Toxic Gases Sensor

摘要

In recent years, environmental pollution, particularly toxic gases and vapors, have greatly increased; hence, their detection has become increasingly important. This paper investigates ZnO thin films fabricated by the spray pyrolysis method to fabricate a toxic gases sensor. A ZnO thin film of 100 nm thickness was deposited on a glass substrate at 100A degrees C. The crystallographic structure was characterized by x-ray diffraction and a field-emission scanning electron microscope was employed to investigate the surface physical morphology and chemical composition. Sensitivity and selectivity of the sample were tested with respect to different toxic gases and vapors including carbon monoxide, ammonia, hydrogen sulfide, chlorine, nitrogen dioxide, benzene, formaldehyde and toluene in the temperature range of 100-300A degrees C. The results showed that the ZnO thin film is more selective to NO2 gas than the other toxic gases and vapors in the studied temperature range. The ZnO thin film-based NO2 gas sensor also showed a good reproducibility, stability, and detection limit of 10 ppm at the operating temperature of 200A degrees C.