Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process

Wei Zhou; Shaoyu Liu; Wei Liu; Chenying Zhang; Yaoyao Li; Wenjing Xu; Kwan San Hui

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Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process

机译：具有激光微观工艺的倾斜微观结构的新型干金属电极

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? Dry metal electrodes with tilted microstructure arrays is fabricated.

? Laser micromilling process of tilted microstructure arrays is discussed.

? Effect of process parameters on surface microstructure arrays is investigated.

? Optimized process parameters are obtained to fabricate tilted microstructure arrays.

? Eelectrodes with tilted microstructures show lower impedance than vertical microstructures.

Abstract

机译：<！[cdata [

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？制造倾斜微结构阵列的干燥金属电极。

？倾斜微观结构阵列的激光微型过程。

？过程的效果研究了曲面微结构阵列的参数。

？优化进程段落获得制造倾斜的微结构阵列。

？倾斜微结构的电磁极显示比垂直微结构的较低阻抗。

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来源
《Sensors and Actuators, A. Physical 》 |2017年第2017期| 共8页
作者
Wei Zhou; Shaoyu Liu; Wei Liu; Chenying Zhang; Yaoyao Li; Wenjing Xu; Kwan San Hui;
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作者单位

Department of Mechanical &

Electrical Engineering Xiamen University;

Department of Mechanical &

Electrical Engineering Xiamen University;

Department of Mechanical &

Electrical Engineering Xiamen University;

Department of Mechanical &

Electrical Engineering Xiamen University;

Department of Mechanical &

Electrical Engineering Xiamen University;

Department of Mechanical &

Electrical Engineering Xiamen University;

School of Mathematics University of East Anglia;

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原文格式 PDF
正文语种 eng
中图分类 TP212.1;
关键词
Dry metal electrode; Laser micromilling; Surface microstructures; Impedance measurement;

机译：干燥金属电极;激光微型;表面微观结构;阻抗测量;

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专利

1. Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process [J] . Wei Zhou, Shaoyu Liu, Wei Liu, Sensors and Actuators, A. Physical . 2017 ,第期

机译：具有激光微观工艺的倾斜微观结构的新型干金属电极
2. An AlGaAs laser with high-quality dry etched mirrors fabricated using an ultrahigh vacuum in situ dry etching and deposition processing system [J] . Uchida M., Ishikawa S. IEEE Journal of Quantum Electronics . 1988 ,第11期

机译：使用超高真空原位干法刻蚀和沉积处理系统制造的具有高质量干法刻蚀镜的AlGaAs激光器
3. A Self-Aligned Process to Fabricate a Metal Electrode-Quantum Dot/Nanowire-Metal Electrode Structure with 100％ Yield [J] . FU Ying-Chun, WANG Xiao-Feng, FAN Zhong-Chao, 中国物理快报：英文版 . 2012 ,第009期

机译：一种自对准过程，可制备产率为100％的金属电极-量子点/纳米线-金属电极结构
4. A Study of Microstructure and Surface Hardness of Parts Fabricated by Laser Direct Metal Deposition Process [C] . Mehdi Soodi, Milan Brandt, Syed Masood International conference on material and manufacturing technology . 2010

机译：激光直接金属沉积工艺制造零件的组织和表面硬度的研究
5. Relating Processing-Microstructure-Mechanical Properties of Inconel 718 Fabricated by Selective Laser Melting [D] . Holland, Sharniece. 2018

机译：通过选择性激光熔化制造的Inconel 718的加工 - 微结构 - 机械性能
6. Aluminum Parts Fabricated by Laser-Foil-Printing Additive Manufacturing: Processing Microstructure and Mechanical Properties [O] . Chia-Hung Hung, Yingqi Li, Austin Sutton, 2020

机译：通过激光箔印刷增材制造制造的铝制零件：加工微结构和机械性能
7. Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process [O] . Zhou, Wei, Liu, Shaoyu, Liu, Wei, 2017

机译：采用激光微铣削工艺制备的具有倾斜微结构的新型干金属电极
8. Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools; Journal of Microelectromechanical Systems [R] . Adams, Vasile, M. J. , Benavides, 1999

机译：用聚焦离子束制造工具微细研磨金属合金;微机电系统杂志

Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process

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