Fabrication of poly (vinylidene fluoride-trifluoroethylene) - Zinc oxide based piezoelectric pressure sensor

摘要

We report the fabrication, packaging and characterization of pressure sensing device using piezoelectric polymer nanocomposite as the sensing active layer. We introduce Poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE))/ 1% Zinc oxide (ZnO) piezoelectric polymer nanocomposite as pressure sensing material. Optimized polymer nanocomposite is employed for real environment pressure sensor fabrication. A recipe for the fabrication of pressure sensor with polymer nanocomposite is suggested and fabricated. Process flow involved in the fabrication and various stages of optimizations are discussed. Packaging and characterization of fabricated pressure sensor devices are also discussed. The ability of the packaged device to sense the air pressure is analyzed through a working prototype having a sensitivity of 0.175 mu V/psi. Results obtained from the device shows the capability of material to act as a sensor. (C) 2019 Elsevier B.V. All rights reserved.