A nanocomposite coating improving the accuracy in infrared temperature measurement for thermal micro-devices

摘要

A nanocomposite coating consisting of black carbon (BC) nanoparticles and polyimide (PI) is introduced to standardize different emission sources on device surface for the real-time high-accuracy high-resolution infrared (IR) temperature measurement. A testing device is designed and fabricated to study the role of the coating on the improvement of thermography accuracy. The experimental results show that for the testing device with the optimal nanocomposite coating, the temperature difference between IR measured temperature for different material is reduced from 52.3 K to 0.5 K, consistent with the actual uniform temperature distribution. The deviation between IR measured temperature and the actual temperature is reduced to 1 K, which is much less than 60 K without the nanocomposite coating. Moreover, the experimental results depending on the coating thickness are discussed. Finally, an application example of this method for the micro-hotplate is presented in this paper. (C) 2019 Elsevier B.V. All rights reserved.