Self-Assembly of an Ultrahigh-χ Block Copolymer with Versatile Etch Selectivity

著录项

• 来源
  《Macromolecules》 |2018年第16期|共8页
• 作者

  Koei Azuma; Jian Sun; Youngwoo Choo; Yekaterina Rokhlenko; Jonathan H. Dwyer; Beau Schweitzer; Teruaki Hayakawa; Chinedum O. Osuji; Padma Gopalan;

  展开▼
• 作者单位

  Department of Materials Science and Engineering School of Materials and Chemical Technology Tokyo Institute of Technology;

  Department of Materials Science and Engineering and Department of Chemical and Biological Engineering University of Wisconsin—Madison Madison;

  Department of Chemical and Environmental Engineering Yale University New Haven;

  Department of Chemical and Environmental Engineering Yale University New Haven;

  Department of Materials Science and Engineering and Department of Chemical and Biological Engineering University of Wisconsin—Madison Madison;

  Department of Materials Science and Engineering and Department of Chemical and Biological Engineering University of Wisconsin—Madison Madison;

  Department of Materials Science and Engineering School of Materials and Chemical Technology Tokyo Institute of Technology;

  Department of Chemical and Environmental Engineering Yale University New Haven;

  Department of Materials Science and Engineering and Department of Chemical and Biological Engineering University of Wisconsin—Madison Madison;

  展开▼
• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类 高分子化学（高聚物）;
• 关键词