Comparative study of plasma-deposited fluorocarbon coatings on different substrates

摘要

The deposition of hydrophobic fluorocarbon coatings from C _2F_6 and C_2F_6-H_2 rf discharges on different substrates was examined. Polyester textile, glass and two different ceramic compounds were used as substrates. The effect of the total gas pressure, the rf power dissipation and the deposition time on the hydrophobic character of the samples was investigated. Films deposited on polyester textiles at low pressure (0.03 mbar) and power consumption (16 mW cm~(-2)) using pure C_2F_6 presented the highest water contact angles (～150°). On the other hand, the addition of hydrogen was necessary in order to deposit stable hydrophobic coatings on glass and ceramic substrates. Coatings deposited on glass at intermediate deposition rates (～100 ? min~(-1)) and pressures presented the highest angles (～105°). Concerning the heavy clay ceramics, samples treated in low-pressure (0.05 mbar) and low-power (16 mW cm~(-2)) discharges showed the highest contact angles. The deposition time was found to play an important role in the hydrophobicity and long-term behaviour of porous and rough substrates.