The Meyer-Neldel rule in the conductivity of insulating germanium nitride and oxynitride films

摘要

Electrical conductivity, sigma(T), of a-Ge3Nx (3.7 < x < 4.6) and quasi-stoichiometric a-Ge2OyNx films has been investigated as a function of the temperature. Layers present a highly insulating behavior with conductivity and thermal activation energy rapidly rising, increasing T from room temperature to 600 K. Depending on the film composition, the conductivity can vary up to six orders of magnitude.