Optically tunable arrayed structures for highly sensitive plasmonic detection via simplified holographic lithography

摘要

Hexagonally arranged plasmonic dot arrays were fabricated using simplified holographic lithography, electron-beam evaporation and lift-off processes. In our strategy, we used face-centered cubic structures as metal deposition masks which were created by prism holographic lithography. The features of plasmonic dot arrays such as arrangements, shapes, and sizes depended on the number of face-centered cubic structure layers and the laser exposure dose. The arrays showed tunable optical properties and were useful for surface-enhanced Raman scattering.