Protection Effect of ZrO_2 Coating Layer on LiCoO_2 Thin Film Fabricated by DC Magnetron Sputtering

摘要

Bare and ZrO_2-coated LiCoO_2 thin films were fabricated by direct current magnetron sputtering method on STS304 substrates. Deposited both films have a well-crystallized structure with (003) preferred orientation after annealing at 600℃. The ZrO_2-coated LiCoO_2 thin film provide significantly improved cycling stability compared to bare LiCoO_2 thin film at high cut-off potential (3.0-4.5 V). The improvement in electrochemical stability is attributed to the structural stability by ZrO_2 coating layer.