Influence of Annealing Condition on The Structure and Optical Properties of Na-doped ZnO Thin Films Prepared by Sol-Gel Method

摘要

Na-doped ZnO thin films were deposited on Si (100) substrates by sol-gel method. X-ray diffraction (XRD) analyses revealed that all the films had a polycrystalline wurtzite structure and high c-axis preferred orientation. PL spectra showed that the thin films produced strong emissions near ultraviolet (UV) and weak, defect-related deep-level emissions in visible regions. In addition, the effects of annealing condition on the structural and optical properties are discussed.