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Investigation of the characteristics of DLC films on oxynitriding-treated ASP23 high speed steel by DC-pulsed PECVD process

机译:直流脉冲PECVD工艺对氧氮化处理ASP23高速钢上DLC膜的特性进行研究

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In this study, diamond-like carbon (DLC) films are coated onto oxynitriding-treated ASP23 high-speed steel by DC-pulsed PECVD. The main research parameters of the DC-pulsed PECVD process are the various duty cycles (5%, 10%, 15% and 20%) used to examine the coating characteristics. In order to investigate the DLC film properties, a Raman spectroscopy analysis, wear test, adhesion, and hardness tests are performed. The experimental results show that the duplex coating layers have optimal properties when DLC films are treated with a low-pulse voltage (-1.5 kV), a coating time of 90 min and duty cycles maintained at 10%. As a result, the DLC/oxynitriding duplex-treated specimens with the highest surface hardness (Hv(0.01) 1931) and the lowest wear volume loss (3 x 10(-3) mm(3)) can be acquired. In addition, compared with non-treated (polarization resistance R-p = 5 x 10(3) Omega cm(2)) and oxynitriding-treated (R-p = 8 x 10(3) Omega cm(2)) specimens, the optimal DLC/oxynitriding duplex-treated ASP23 high-speed steel possesses the lowest corrosion current (I-corr = 8 x 10(-6)A cm(-2)) and highest polarization resistance (R-p = 1 x 10(4) Omega cm(2)) in 3.5 wt.% NaCl solutions. This result confirms that the DLC/oxynitriding duplex treatment enhances optimal wear and corrosion resistance. (C) 2014 Elsevier B.V. All rights reserved.
机译:在这项研究中,通过直流脉冲PECVD将类金刚石碳(DLC)膜涂覆在经氧氮化处理的ASP23高速钢上。直流脉冲PECVD工艺的主要研究参数是用于检查涂层特性的各种占空比(5%,10%,15%和20%)。为了研究DLC薄膜的性能,进行了拉曼光谱分析,磨损测试,附着力和硬度测试。实验结果表明,当用低脉冲电压(-1.5 kV)处理DLC膜,90分钟的涂覆时间和保持10%的占空比时,双相涂层具有最佳性能。结果,可以获得具有最高表面硬度(Hv(0.01)1931)和最低磨损量损失(3 x 10(-3)mm(3))的DLC /氧氮化双处理样品。此外,与未处理(极化电阻Rp = 5 x 10(3)Omega cm(2))和经氧氮化处理(Rp = 8 x 10(3)Omega cm(2))的样品相比,最佳DLC /经氧氮化双相处理的ASP23高速钢具有最低的腐蚀电流(I-corr = 8 x 10(-6)A cm(-2))和最高的极化电阻(Rp = 1 x 10(4)Omega cm(2) ))在3.5 wt。%NaCl溶液中。该结果证实了DLC /氧氮化双工处理增强了最佳的耐磨性和耐腐蚀性。 (C)2014 Elsevier B.V.保留所有权利。

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